The JSM-7000F offers high resolution, a multi-purpose specimen chamber, a motorized, automated specimen stage, one-action specimen exchange, and ideal geometry with large probe current at small probe diameter for EDS, WDS, EBSP, and CL. Along with a Windows® 2000 based computer Intuitive User Interface which allows for unprecedented ease of operation, the JSM-7000F SEM also supports full integration of EDS, WDS, e-beam lithography, and an image database. Stage automation is standard with a 5 axis computer control of X, Y, Z Tilt and eucentric rotation.