JXA-8200 SuperProbe Electron Probe Microanalyzer (EPMA)
The JXA-8200 SuperProbe is a high resolution SEM and a WD/ED Combined Electron Probe Microanalyzer (EPMA). The combination of up to 5 wavelength dispersive X-ray spectrometers (WDS) and an energy dispersive X-ray spectrometer (EDS) assures the most efficient and accurate analysis. Computer input analyzes data from the two types of X-ray spectrometers and presents the data as a unified analysis. The WD/ED combined system can simultaneously analyze up to 21elements (5 WDS, 16 EDS). The backscattered electron image, provided by a highly sensitive solid state detector, and the secondary electron image, brings the total obtainable signals to 23. The WD/ED combined microanalyzer provides for:
higher detection sensitivity for trace elements
higher accuracy of quantitative analysis
higher resolving power (resolution) for adjacent X-rays
higher accuracy of quantitative analysis for light elements
The automated stage can handle samples up to 6"x 6"x 2" through the airlock, and can reposition a sample to less than 0.5um