germane

In semiconductor manufacturing germane (GeH4) is used for the deposition of epitaxial and amorphous silicon-germanium alloy layers (MOCVD).
 
CAS Number : 7782-65-2
Other names: Germanium hydride; Germanium tetrahydride; Monogermane



The term "germane" was found in the following pages:

Journals database: Transactions of the American Fisheries Society
Journals database: Ecology of Food and Nutrition