High-purity arsine is exclusively used in semiconductor manufacturing. The arsenic atom is an n-type dopant for epitaxial silicon. Arsenic is introduced in the silicon wafer by diffusion or implantation techniques.

The presence of traces of arsine in the environment has been observed in gas purged from natural waters and in hot springs.

CAS Number : 7784-42-1
Other names: Arsenic hydride; Arsenic trihydride; Arsenous hydride; Hydrogen arsenide; Arsenic hydrid