Secondary ion mass spectrometry (SIMS) is a mass-spectrometric technique that is used for microscopic chemical analysis. A beam of primary ions with an energy of 5- 20 kiloelectronvolts (keV) bombards a small spot on the surface of the sample under ultra- high vacuum conditions. Positive and negative secondary ions sputtered from the surface are analyzed in a mass spectrometer in regards to their mass-to-charge ratio.

EVISA Instrument Database: SIMS systems