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Literature / Source Database:
Journal of Vacuum Science and Technology, Part B
Description
the official journal of the AVS
| Title (short) |
J. Vac. Sci. Technol., Part B |
| Title (abbrev) |
JVST-B |
| CODEN |
JVTBD9 |
| Languages |
English |
| First year |
1983 |
| Impact factor |
1.597 |
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Status
active
Subject
Source type
Journal
Publisher
ISBN ISSN
0734-211x; 1071-1023
First volume
4
Last volume
18
Homepage
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Availability |
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| Text PDF |
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free access |
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| Text Html |
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for subscriber |
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| References |
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not available |
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| Abstracts |
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| TOC |
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Description
The Journal of Vacuum Science and Technology B is devoted to reports of original research, review articles, and Critical Review articles. The JVST B has been established to provide a vehicle for the publication of research dealing with microelectronics and nanometer structures.
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