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Instrument Database:
Shimadzu Corporation - Superscan SSX-550 SEM-EDX
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| Year of introduction |
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| Status |
available |
| Company |
Shimadzu Corporation
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From SEM Observation through to EDX Analysis
Opening up a new world through an ergonomic integrated operation environment!
Not only can points be observed but their composition can also be analyzed in one continuous, rapid flow.
Outline
Shimadzu Corporation - as a general analysis manufacturer of SEM, EPMA and EDX - have released the Analytical Scanning Electron Microscope SUPERSCAN SSX-550 packed with detailed X-ray analysis technology.
SUPERSCAN SSX-550 is a SEM-EDX combined system which achieves an ergonomic integrated operation environment from SEM observation through to EDX analysis.
Features
- SEM-EDX integrated design with streamline compactness realized.
- Shimadzu\'s SEM-EDX combined system enables smooth operating from observation to analysis at one monitor (used in the same way as the combination with Word and Excel).
- Graphical User Interface (GUI) is achieved with Windows NT.
- Functionally arranged easy-to-recognize icons make operating easy for even the beginner.
- SEM and EDX data are completely digital. Making files available via networks and creating reports are easy operations.
- The device can be used in assured knowledge that services - including maintenance - are fully covered as Shimadzu supply the whole system
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| Specifications |
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SEM unit | Resolution | 3.5 nm | | Magnification | x 20 ~ x 300,000 | | Accelerating voltage | 0.5 to 30kV 10V step | | Sample size | Observation of all regions possible up to the maximum diameter of 125mm | | Specimen stage | Eucentric 5-axis motor stage
X : 80mm, Y : 40mm
Z : 40mm, R : 360° endless
T : -30° ~ +60° | | Electron gun | Pre-centered W hairpin filament
Auto gun bias | | Image process function | Image memory 640 x 480 pixels
1280 x 960 pixels
Recursive filter
Integral filter
Gamma correction
Binarization
Local filter | | Automated functions | Filament saturation
Gun alignment
Focus
Stigmator
Contrast brightness |
Computer | PC, OS | PC/AT compatible machine
Windows NT | | Monitor | 17 inch SVGA monitor | | Operating system | Mouse, keyboard |
EDX Unit | Detector | UTW detector : Resolution 144eV or less ,Area 10mm2, C to U
Number of MCA channels : 4000 channels
Liquid nitrogen container : 5l (standard), 10l (selectable)
Liquid nitrogen rate of consumption : Approx. 1.0l/day
Measuring time : 1msec units
Temperature cycle : Possible
| | Functions | Qualitative analysis
KLM maker
Automatic identification
Manual identification
| Quantitative analysis
Standardless
ZAF method, f (rZ) method
Standard
ZAF method, f (rZ) method
| Line analysis
Maximum 15 elements | Mapping
Maximum 15 elements
Pixels: 32 x 32 to 512 x 512
Simultaneous display of 16 screens
One of these is a SEM image
| Data processing
Smoothing
Background deletion
Peak search
Waveform (multi-layered peaks) division
Adding and subtracting between spectrums
Constant value adding and subtracting
ROI setting (automatic and manual)
Data display and screen output in real time
| Data display
Expansion and reduction of all types
Linear/log display switching
Gradation setting (map charts)
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