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Instrument Database:
PANalytical B.V. - X'Pert PRO MRD
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| Year of introduction |
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| Status |
available |
| Company |
PANalytical B.V.
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| Categories |
X-ray spectrometer: XRD
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PANalytical's X'Pert PRO Materials Research Diffractometer is the most flexible system available for X-ray diffraction studies for:
- advanced materials science and nanotechnology
- metrologic characterization in semiconductor process development.
It can handle a wide range of applications, and is especially suitable for thin film analysis applications such as:
- rocking curve analysis and reciprocal space mapping
- reflectometry and thin film phase analysis
- residual stress and texture analysis.
As well as the proven standard version of the X'Pert PRO MRD system, a number of special versions exist:
- With the X'Pert PRO MRD system for In-plane diffraction, it becomes possible to measure diffraction from lattice planes that are perpendicular to the sample surface.
- The X'Pert PRO Extended MRD allows mounting of an X-ray mirror and a high-resolution monochromator in-line, increasing the intensity of the incident beam.
- The X'Pert PRO MRD XL meets all the high-resolution XRD analysis requirements of the semiconductors, thin films, and advanced materials industries.
- By facilitating analysis of wafers up to 300 mm in diameter, with a sophisticated, automatic wafer loader option, the X'Pert PRO MRD XL becomes an advanced tool for thin film process development.
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