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Instrument Database:
Carl Zeiss AG - Supra 40 WDS
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| Year of introduction |
2005 |
| Status |
historical ( out of sale ) |
| Company |
Carl Zeiss AG
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| Categories |
Microscopy: Electron: SEM: FE
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Designed for the requirements of nano-analysis, the SUPRA™ 40 WDS accommodates both EDS and WDS fully-focussing spectrometers. The extended performance of the GEMINI® column delivers ample beam current for the most demanding WDS analysis. The short working distance allows simultaneous acquisition of EDS, WDS, SE, BSD, CL and specimen current signals. The variable pressure version of the SUPRA™ 40WDS adds the advantage of analysis of non-conducting specimens.
Key Features
- Ultra high resolution over the complete high voltage range: 1.3nm @ 15kV, 2.1nm @ 1kV
- Ultra stable high current GEMINI® electron optics, 20nA, 0.2%/h
- Unique In-lens detector for high contrast topographic imaging
- Special WDS compatible chamber with short analytical working distance of 8.5mm
- Fully motorised eucentric stage for automated analysis
- Superior resolution for VP mode: 2nm @ 30kV
- Easy operation through Windows® based SmartSEM™ control software
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| Specifications |
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Resolution
1.3 nm @ 15 kV
2.1 nm @ 1 kV
5.0 nm @ 0.2 kV
2.0 nm @ 30 kV (VP version only)
VP Vacuum
2 - 133 Pa, adjustable in steps of 1 Pa
Magnification
12 - 900,000x
Emitter
Thermal field emission type
Acceleration Voltage
0.1 - 30 kV
Probe Current
4 pA - 10 nA (20 nA optional)
Standard Detectors
High efficiency In-lens detector
Everhart-Thornley Secondary Electron Detector (HV only)
MPSE for SE detection in HV and VP mode (VP only)
Chamber
330 mm (Ø) x 270 mm (h)
1 EDS port 35° TOA
CCD-camera with IR illumination
5-Axes Motorised Cartesian Specimen Stage
X = 130 mm
Y = 130 mm
Z = 50 mm
T = -3 - 70°
R = 360° (continuous)
Image Processing
Resolution: Up to 3072 x 2304 pixel
Noise reduction: Seven integration and averaging modes
Image Display
Single 19" TFT Monitor with SEM image displayed at 1024 x 768 pixels
Image Hardcopy
Choice of Windows® driven laser, inkjet or video print media
System Control
SmartSEM™* with Windows® XP, operated by mouse, keyboard and joystick with optional control panel
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