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Instrument Database:
Carl Zeiss AG - SUPRA 55VP
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| Year of introduction |
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| Status |
historical ( out of sale ) |
| Company |
Carl Zeiss AG
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| Categories |
Microscopy: Electron: SEM: FE
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Combining several instruments in one, the SUPRA™ 55VP with the improved GEMINI® column is a true nanoscience FESEM. It provides ultra high resolution imaging over the complete voltage range with the ability to handle large awkwardly shaped specimens. It is also a fully analytical FESEM with up to 20nA probe current available and comprises variable pressure technology for examining non-conducting specimens without prior time consuming preparation.
Key Features
- Ultra high resolution at low kV: 1.7nm @ 1.0kV, 4 nm @ 0.1kV
- High efficiency In-lens detector for clear topographic imaging in high vacuum mode
- Enhanced VPSE detector for VP mode: 2nm @ 30kV
- Ultra stable high current mode X-ray analysis and EBSD applications; better than 0.2%/h
- Large 5-axes motorised eucentric stage
- Fully automated vacuum system with straight forward point and click selection of vacuum pressure
- Easy operation through Windows® based SmartSEM™ control software
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| Specifications |
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Resolution
1.0nm @ 15 kV
1.7nm @ 1 kV
3.5nm @ 0.2kV
2.0nm @ 30 kV (VP mode)
VP Vacuum
2 - 133 Pa, adjustable in steps of 1 Pa
Magnification
12 - 900,000x
Emitter
Thermal field emission type
Acceleration Voltage
0.1 - 30 kV
Probe Current
4 pA - 10 nA (20 nA optional)
Standard Detectors
High efficiency In-lens detector
Everhart-Thornley Secondary Electron Detector
VPSE Detector
Chamber
330 mm (Ø) x 270 mm (h)
1 EDS port 35° TOA
CCD-camera with IR illumination
5-Axes Motorised Cartesian Specimen Stage
X = 130 mm
Y = 130 mm
Z = 50 mm
T = -3 - 70°
R = 360° (continuous)
Image Processing
Resolution: Up to 3072 x 2304 pixel
Noise reduction: Seven integration and averaging modes
Image Display
Single 19" TFT Monitor with SEM image displayed at 1024 x 768 pixels
Image Hardcopy
Choice of Windows® driven laser, inkjet or video print media
System Control
SmartSEM™* with Windows® XP, operated by mouse, keyboard and joystick with optional control panel
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