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The establishment of EVISA is funded by the EU through the Fifth Framework Programme (G7RT- CT- 2002- 05112).


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Carl Zeiss AG - SUPRA 60

Year of introduction
Status historical ( out of sale )
Company Carl Zeiss AG
Categories Microscopy: Electron: SEM: FE
The sophisticated 6" super eucentric stage of the SUPRA™ 60 combined with the 8" integrated airlock offers the perfect solution for full wafers and cross sectional semiconductor applications. The SUPRA™ 60 with the new improved GEMINI® column and its excellent low voltage capabilities is the instrument of choice when examining delicate specimens and uncoated wafers. The refined stage control for the SUPRA™ 60 includes magnification compensated stage movements for ease of use. The variable eucentric working distance means that both large and small samples can be tilted with minimal image shift giving quicker results with less adjustments.

Key Features
  • Ultra high resolution over the complete voltage range: 1.0 nm @ 15 kV, 1. 7nm @ 1 kV
  • 6-axes motorised super eucentric specimen stage with ultra fine stage control
  • High efficiency In-lens detector for clear surface specific SE imaging
  • Short analytical working distance of 8.5 mm for simultaneous high resolution imaging and X-ray analysis
  • Large sample throughput with integrated 8'' airlock
  • Easy operation through Windows® XP based SmartSEM™ control software
Specifications
Resolution    
1.0 nm @ 15 kV
1.7 nm @ 1 kV
4.0 nm @ 0.1 kV

Magnification    
12 - 900,000x

Emitter    
Thermal field emission type

Acceleration Voltage    
0.1 - 30 kV

Probe Current    
4 pA - 10 nA (20 nA optional)

Standard Detectors    
High efficiency In-lens detector
Everhart-Thornley Secondary Electron Detector

Chamber    
520 mm (Ø) x 300 mm (h)
1 EDS port 35° TOA
Integrated 8" airlock
CCD-camera with IR illumination

6-Axes Motorised Super-Eucentric Specimen Stage    
X = 152 mm
Y = 152 mm
Z = 43 mm
Z. = 10 mm
T = -15 - 60°
R = 360° (continuous)

Image Processing    
Resolution: Up to 3072 x 2304 pixel
Noise reduction: Seven integration and averaging modes

Image Display    
Single flicker-free 19" XVGA monitor with SEM image displayed at 1024 x 768 pixel
TFT optionally available

Image Hardcopy    
Choice of Windows® driven laser, inkjet or video print media

System Control    
SmartSEM™* with Windows® XP, operated by mouse, keyboard and joystick with optional control panel





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