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Instrument Database:
Carl Zeiss AG - SUPRA 60VP
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| Year of introduction |
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| Status |
historical ( out of sale ) |
| Company |
Carl Zeiss AG
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| Categories |
Microscopy: Electron: SEM: FE
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The SUPRA™ 60VP is the variable pressure version of the SUPRA™ 60. With its large cylindrical chamber, refined super eucentric 6-axes motorised stage, 8" integrated airlock and added variable pressure capabilities this instrument offers the perfect solution for full wafer and semiconductor applications. It is equally useful for users who need to image a variety of non-conducting sample types. The SUPRA™ 60VP offers the ability to image non-conducting specimens, like coated glass lenses, PCB's, ceramic parts and hard-coated tools without specimen coating, therefore minimising preparation time and increasing throughput.
Key Features
- Ultra high resolution over the complete voltage range: 1.0 nm @ 15kV, 1.7 nm @ 1 kV
- Superior resolution in VP mode: 2.0 nm @ 30 kV
- Minimal specimen preparation for imaging and X-ray analysis
- High efficiency In-lens detector for clear surface specific SE imaging
- Short analytical working distance of 8.5 mm for simultaneous high resolution imaging and X-ray analysis
- Large sample throughput with integrated 8 inch airlock
- Easy operation through Windows® XP based SmartSEM™ control software
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| Specifications |
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Resolution
1.0 nm @ 1 kV
1.7 nm @ 1 kV
4.0 nm @ 0.1 kV
2.0 nm @ 30 kV (VP mode)
VP Vacuum
2 - 133 Pa, adjustable in steps of 1 Pa
Magnification
12 - 900,000x
Emitter
Thermal field emission type
Acceleration Voltage
0.1 - 30 kV
Probe Current
4 pA - 10 nA (20 nA optional)
Standard Detectors
High efficiency In-lens detector
Everhart-Thornley Secondary Electron Detector
VPSE Detector
Chamber
520 mm (Ø) x 300 mm (h)
1 EDS port 35° TOA
Integrated 8" airlock
CCD-camera with IR illumination
6-Axes Motorised Super-Eucentric Specimen Stage
X = 152 mm
Y = 152 mm
Z = 43 mm
Z. = 10 mm
T = -15 - 60°
R = 360° (continuous)
Image Processing
Resolution: Up to 3072 x 2304 pixel
Noise reduction: Seven integration and averaging modes
Image Display
Single flicker-free 19" XVGA monitor with SEM image displayed at 1024 x 768 pixel
TFT optionally available
Image Hardcopy
Choice of Windows® driven laser, inkjet or video print media
System Control
SmartSEM™* with Windows® XP, operated by mouse, keyboard and joystick with optional control panel
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