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Instrument Database:
Carl Zeiss AG - LIBRa 200 FE
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| Year of introduction |
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| Status |
available |
| Company |
Carl Zeiss AG
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| Categories |
Microscopy: Electron: TEM: FE
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The LIBRA® 200FE is the first EFTEM that combines the versatility of the new In-column corrected OMEGA energy filter with a highly efficient field emission system and Koehler illumination.
The prealigned OMEGA filter provides fully integrated filtered imaging and spectroscopy capabilities for comprehensive analysis in semiconductor, material analysis and life science research. Consequently, the LIBRA® 200FE ensures that you obtain optimum results from your sample with genuine ease of operation in EFTEM, EELS, HRTEM, STEM and diffraction work.
The new 2nd order corrected spectrometer allows unrivalled isochromatic sample viewing areas and diffraction angle acceptance at sub-eV energy resolution. Excellent instrument performance results from the advanced 300 mm column concept and the newly developed control electronics for sub-ppm stability.
The LIBRA® 200FE is operated through dedicated control panels and the WinTEM™ GUI following the successful philosophy of the SEM instruments for maximum convenience and consistent look-and-feel operation across the complete EM product range.
Key Features
- 200 kV Schottky field emitter with Koehler illumination system
- Ultra high resolution over the full high voltage range
- In-column corrected OMEGA filter
- HR- and HT-objective lenses
- High precision 5-axes goniometer stage
- Rotation-free projector system
- 300 mm high stability column
- Dry differential vacuum system
- Sub-ppm stability control electronics
- WinTEM™ graphical user interface
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| Specifications |
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Acceleration Voltage
120 and 200 kV
Illumination System
Highly flexible advanced Koehler illumination system
Objective Lenses
Truly symmetrical type
Resolution HR HT
Point-to-Point: 0.24 nm 0.29 nm
Information Limit: <0.14 nm <0.19 nm
STEM: <0.30 nm <0.45 nm
Spectrometer
2nd order aberration corrected OMEGA type
Dispersion: 1.85 µm/eV @ 200 kV
Energy resolution: <0.7 eV
Distortion: <1.5 %
Acceptance angle: 100 mrad @ Δ = ±5 eV
Isochromaticity: <0.5 eV in 2.5 µm Ř
Specimen Stage 5-axes fully eucentric goniometer
Tilt range α/β: ±30° / ±30° (HR)
±70° / ±30° (HT)
Imaging System
Two 3 lens projector groups in front and below the energy filter for rotation free imaging and spectroscopy
Magnification
TEM: 8 - 1,000,000 x
STEM: 2,000 - 5,000,000x
EELS: 20 - 315x
Modes of Operation
TEM, EFTEM, EELS, Elemental Contrast and Analysis, CBED/LACBED, EDS, STEM (BF/DF/HAADF)
Vacuum System
Oil-free differential vacuum system
* Pre-vacuum scroll pump with buffer tank
* TMP for viewing chamber, filter and airlock
* Two IGPs (50/20 l/s) for the column
* Two IGPs (55 l/s) for the emitter area
System Control
WinTEM™ Graphical User Interface (GUI) with Windows®XP, operated by mouse, keyboard and dedicated control panels.
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