The ULTRA 55 represents the latest development in GEMINI® technology. Based on the SUPRA™ 55, the ULTRA 55 now comprises a fully integrated Energy and angle selective Backscattered electron (EsB) detector. The ULTRA 55 offers ultra high resolution for both SE to image surface information and BSE to present compositional information. The new EsB detector features an integrated filtering grid to enhance image quality and requires no additional adjustments. The EsB detector is less sensitive for edge contrast and charging effects which enables precise imaging and measurement of boundaries, particles, and features. Combined with the large multi-port analytical chamber, the fully motorised 5-axes motorised eucentric stage and the GEMINI® high current mode the ULTRA 55 also offers superb analytical capabilities.
Key Features
Ultra high resolution imaging at low kV
Ideal for precise boundary, feature, and particle measurements
High efficiency EsB detector for compositional information
High efficiency In-lens SE detector for high contrast surface imaging
BSE imaging at very short working distances - 1mm WD
Ultra stable high current mode for X-ray analysis and EBSD applications - 20 nA / 0.2%/h
Large five axes motorised eucentric stage
Easy operation through Windows® XP based SmartSEM™ control software
Magnification 12 - 900,000x in SE mode 100 - 900,000x with EsB detector
Emitter Thermal field emission type, stability >0.2%/h
Acceleration Voltage 0.1 - 30 kV
Probe Current 4 pA - 10 nA (20 nA optional)
Standard Detectors EsB detector with filtering grid Filtering grid voltage 0 - 1500 V High efficiency In-lens SE detector Everhart-Thornley Secondary Electron Detector
Chamber 330 mm (Ø) x 270 mm (h) 2 EDS ports 35° TOA CCD-camera with IR illumination
5-Axes Motorised Eucentric Specimen Stage X = 130 mm Y = 130 mm Z = 50 mm T = -3 - 70° R = 360° (continuous)
Image Processing Resolution: Up to 3072 x 2304 pixel Noise reduction: Seven integration and averaging modes
Image Display Single flicker-free 19" XVGA monitor with SEM image displayed at 1024 x 768 pixel TFT optionally available
Image Hardcopy Choice of Windows® driven laser, inkjet or video print media
System Control SmartSEM™* with Windows® XP, operated by mouse, keyboard and joystick with optional control panel