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The establishment of EVISA is funded by the EU through the Fifth Framework Programme (G7RT- CT- 2002- 05112).


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Instrument Database:

Carl Zeiss AG - ULTRA 60

Year of introduction
Status historical ( out of sale )
Company Carl Zeiss AG
Categories Microscopy: Electron: SEM: FE
The ULTRA 60 with the new Energy and angle selective Backscattered electron (EsB) detector integrated in the GEMINI® column is the instrument of choice for clear and precise imaging on large delicate specimens or uncoated wafers. The ULTRA 60 enables clear topographic imaging with the high efficiency In-lens SE detector. Simultaneous backscattered electron imaging is achieved with the new EsB detector. BSE imaging with its compositional contrast is less sensitive for charging and edge contrast, hence ideal for metrology applications. The superb 6" fully eucentric stage allows tilting with minimal image shift giving quicker results with less adjustments. The refined stage control for the ULTRA 60 includes magnification compensated stage movements for ease of use and fast location of predefined features.

Key Features
  • Ultra high resolution imaging at low kV
  • High efficiency EsB detector for compositional contrast
  • High efficiency In-lens SE detector for high contrast surface imaging
  • BSE imaging at very short working distances: 1mm WD
  • Ideal for feature measurements and metrology
  • Extra large 6-axes motorised fully eucentric stage with fine stage control
  • Large sample throughput with integrated 8" airlock
  • Easy operation through Windows® XP based SmartSEM™ control software
Specifications
Resolution    
1.0 nm @ 15 kV
1.7 nm @ 1 kV
4.0 nm @ 0.1 kV

Magnification    
12 - 900,000x in SE mode
100 - 900,000x with EsB detector

Emitter    
Thermal field emission type, stability >0.2% /h

Acceleration Voltage    
0.1 - 30 kV

Probe Current    
4 pA - 10 nA (20nA optional)

Standard Detectors    
EsB Detector with filtering grid
Filtering grid voltage 0 . 1500 V
High efficiency In-lens SE Detector
Everhart-Thornley Secondary Electron Detector

Chamber    
520 mm (Ø) x 300 mm (h)
1 EDS port 35° TOA
Integrated 8" airlock
CCD-camera with IR illumination

6-Axes Motorised Super-Eucentric Specimen Stage    
X = 152 mm
Y = 152 mm
Z = 43 mm
Z. = 10 mm
T = -15 - 60°
R = 360° (continuous)

Image Processing    
Resolution: Up to 3072 x 2304 pixel
Noise reduction: Seven integration and averaging modes

Image Display    
Single flicker-free 19" XVGA monitor with SEM image displayed at 1024 x 768 pixel
TFT optionally available

Image Hardcopy    
Choice of Windows® driven laser, inkjet or video print media

System Control    
SmartSEM™* with Windows® XP, operated by mouse, keyboard and joystick with optional control panel





Events
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EMEC 24: European Meeting on Environmental Chemistry
26.11.2024
Alicante, Spain
23rd ICFIA: International Conference on Flow Injection Analysis and FRelated Techniques
03.12.2024
The Empress Hotel, Mueang, Chiang Mai, Thailand
PittCon 2025
01.03.2025
Boston, Massachusetts
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