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Instrument Database:
Carl Zeiss AG - EVO® 50 Series
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| Year of introduction |
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| Status |
available |
| Company |
Carl Zeiss AG
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| Categories |
Microscopy: Electron: SEM
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Research Grade Analytical SEM
The EVO®50 series provides quality results from a versatile analytical microscope with a very large specimen chamber. Whether the specimen requires imaging in high vacuum, XVP® or EP, the EVO®50 series is able to image to perfection.
The class leading x-ray geometry provides users with the most accurate analyses in High Vacuum, eXtended Variable Pressure (XVP®), or Extended Pressure (EP) imaging modes. Furthermore, the co-planar geometry provides the ideal environment for EBSD in combination with EDS. With the addition of the LaB6 high brightness source, the EVO®50 achieves an unrivalled status as the leading analytical SEM platform.
The EVO®50 can handle 250 mm diameter specimens at the analytical working distance of 8.5 mm owing to the combination of large movement stage, inclined detectors and conical objective lens.
Whatever your applications, whatever the specimen, the EVO®50 series offers the perfect analytical solution.
Key Features
XVP® for non conducting specimens
Class leading x-ray and analytical geometry
VPSE detector for secondary imaging in XVP®
Future Assured upgrade paths to meet new requirements
BeamSleeve™ accurate analysis of non conductors
Models available: EVO®50 HV, XVP® and EP
EVO®50 WDS, Raman, Raman WDS
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| Specifications |
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Resolution
3.0nm @ 30kV (SE and W)
2.0nm @ 30kV (SE with LaB6 option )
4.5nm @ 30kV (BSD - XVP® mode)
Acceleration Voltage
0.2 to 30 kV
Magnification
5 to 1,000,000x
Field of View
6 mm at the Analytical Working Distance (AWD)
X-ray Analysis
8.5 mm AWD and 35° take-off angle
OptiBeam®* Modes
Resolution, Depth, Analysis, Large Field
XVP® Pressure Range
EP Pressure Range
5 - 750Pa with air, or optionally water vapour
5 - 3000Pa with air
5 - 2000Pa with water vapour
Available Detectors
SE in HV - Everhart-Thornley
SE in XVP® - VPSE
SE in EP - EPSE
BSD in all modes - quadrant semiconductor diode
Chamber
356 mm (Ø) x 255 mm (h)
5-Axes Motorised Compucentric
Specimen Stage X = 100 mm
Y = 125 mm
Z = 55 mm (35 mm motorised)
T = 0° - 90°
R = 360° (continuous)
Stage control by mouse or optional joystick and controlpanel
Future Assured upgrade paths
HV -> XVP® -> EP
Image Processing
Resolution: Up to 3072 x 2304 pixel
Signal acquisition by integrating and averaging
Image Display
Single flicker-free XVGA monitor with SEM image displayed at 1024 x 768 pixel
System Control SmartSEM™** with Windows®, operated by mouse, keyboard and optional control panel.
Multi-lingual Concise GUI
Utility requirements
100 - 240V, 50 or 60 Hz single phase
No water cooling requirement
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