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The establishment of EVISA is funded by the EU through the Fifth Framework Programme (G7RT- CT- 2002- 05112).


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Carl Zeiss AG - SUPRA 40

Year of introduction 2005
Status historical ( out of sale )
Company Carl Zeiss AG
Categories Microscopy: Electron: SEM: FE
The SUPRA™ 40 is a general purpose high resolution FESEM based on the 3rd generation GEMINI® column. Excellent imaging properties combined with analytical capabilities makes this workhorse suitable for a wide range of applications such as materials development, failure analysis, process control, cryo, nanotechnology and analytical applications. The large specimen chamber for the integration of optional detectors and accessories enables the user to configure the SUPRA™ 40 for specific applications without sacrificing productivity or efficiency.

Key Features
  • Superb resolution and image quality at low operating voltages
  • Wide operating voltage range with minimal adjustments required
  • Short working distance of 8.5 mm for simultaneous high resolution imaging and X-ray analysis
  • High probe current (up to 20 nA) and high stability better than 0.2 %/h for analytical applications
  • High efficiency In-lens detector for clear topographic imaging in high vacuum mode
  • Large 5-axes motorised eucentric stage
  • Easy operation through Windows® based SmartSEM™ control software
Specifications
Resolution    
1.3 nm @ 15 kV
2.1 nm @ 1 kV
5.0 nm @ 0.2 kV

Magnification
12 - 900,000x
Emitter    
Thermal field emission type

Acceleration Voltage    
0.1 - 30 kV

Probe Current    
4 pA - 10 nA (20 nA optional)

Standard Detectors    
High efficiency In-lens detector
Everhart-Thornley Secondary Electron Detector

Chamber    
330 mm (Ø) x 270 mm (h)
2 EDS ports 35° TOA
CCD-camera with IR illumination

5-Axes Motorised Eucentric Specimen Stage    
X = 130 mm
Y = 130 mm
Z = 50 mm
T = -3 - 70°
R = 360° (continuous)

Image Processing    
Resolution: Up to 3072 x 2304 pixel
Noise reduction: Seven integration and averaging modes

Image Display    
Single 19" TFT Monitor with SEM image displayed at 1024 x 768 pixels

Image Hardcopy    
Choice of Windows® driven laser, inkjet or video print media

System Control    
SmartSEM™* with Windows® XP, operated by mouse, keyboard and joystick with optional control panel





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