|
Instrument Database:
Carl Zeiss AG - SUPRA 40VP
| |
|
|
No picture !!
|
| |
|
| |
|
| Year of introduction |
2005 |
| Status |
historical ( out of sale ) |
| Company |
Carl Zeiss AG
|
| Categories |
Microscopy: Electron: SEM: FE
|
The unique variable pressure capabilities add an extra dimension to this extraordinary versatile nanotool. It enables ultra high resolution imaging and analysis of non conducting specimens without time consuming preparation. The true workhorse in the SUPRA™ family is well suited for failure analysis, life sciences, nanotech and analytical applications. The combination of the large analytical chamber, the new GEMINI® column and the robust VP technology delivers true performance for a wide range of applications.
Key Features
- Superb resolution and image quality at low operating voltages
- Wide operating voltage range with minimal adjustments required
- Short working distance of 8.5 mm for simultaneous high resolution imaging and X-ray analysis
- High probe current (up to 20 nA) and high stability better than 0.2 %/h for analytical applications
- High efficiency In-lens detector for clear topographic imaging in high vacuum mode
- Enhanced VPSE detector in VP mode
- Easy operation through Windows® based SmartSEM™ control software
|
| Specifications |
|
Resolution
1.3 nm @ 15 kV
2.1 nm @ 1 kV
5.0 nm @ 0.2 kV
2.0 nm @ 30 kV (VP mode)
VP Vacuum
2 - 133 Pa, adjustable in steps of 1 Pa
Magnification
12 - 900,000x
Emitter
Thermal field emission type
Acceleration Voltage
0.1 - 30 kV
Probe Current
4 pA - 10 nA (20 nA optional)
Standard Detectors
High efficiency In-lens detector
Everhart-Thornley Secondary Electron Detector
VPSE Detector
Chamber
330 mm (Ø) x 270 mm (h)
1 EDS port 35° TOA
CCD-camera with IR illumination
5-Axes Motorised Cartesian Specimen Stage
X = 130 mm
Y = 130 mm
Z = 50 mm
T = -3 - 70°
R = 360° (continuous)
Image Processing
Resolution: Up to 3072 x 2304 pixel
Noise reduction: Seven integration and averaging modes
Image Display
Single 19" TFT Monitor with SEM image displayed at 1024 x 768 pixels
Image Hardcopy
Choice of Windows® driven laser, inkjet or video print media
System Control
SmartSEM™* with Windows® XP, operated by mouse, keyboard and joystick with optional control panel
|
|
