The JSM-7401F, JEOL's highest resolution SEM, is a field emission scanning electron microscope (FESEM) incorporating a cold cathode field emission gun, ultra high vacuum, and sophisticated digital technologies for high resolution, high quality imaging of micro structures. Using a patented Gentle Beam™ method, the JSM-7401F produces ultra high resolution at low kV (0.1 kV) and enables observation of true surface structures while helping to reduce charging of non-conductive samples. An r-filter allows variable energy filtering of secondary electrons and backscattered electrons to observe varying contrast from surface morphology images to compositional images. The JSM-7401F also has an available "in-lens" solid state backscatter detector which provides the ultimate in resolution and low kV performance. The JSM-7401F can handle samples up to 8 inches in diameter with its automatic, fully eucentric stage. An auto loading stage is optionally available.
The JSM-7401F is a super intelligent PC SEM assuring compatibility with future computer technologies. Its unique graphical user interface controls condition setup, motor stage drive, imaging, and data filing, assuring stable and reliable operation. Using Windows® 2000 with superior networking as a host computer, the system facilitates the process from imaging to data processing under optimum conditions, allowing the operator to display real-time images, save the data in an external PC through the network, retrieve and manipulate the data.
The JSM-7401F offers flexible analytical geometry optimized for EDS and EBSD.