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Instrument Database:
Thermo Scientific - MICROLAB 350 - Auger Electron Spectrometer
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| Year of introduction |
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| Status |
available |
| Company |
Thermo Scientific
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| Categories |
Surface Analysis: Auger
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MICROLAB 350 is a high-performance, scanning Auger Electron Spectrometer (AES) with High Sensitivity and High Energy Resolution. SEM resolution <7 nm and Scanning Auger Mapping (SAM) resolution <12 nm.
Product Detail
- High-performance scanning Auger electron spectrometer (AES) Secondary Electron Mapping (SEM) at <7 nm Resolution
- Scanning Auger Mapping (SAM) at <12 nm Resolution
- High Sensitivity
- Spherical Sector Analyser Allows High Energy Resolution for:
- Chemical state determination
- Reflected Electron Energy Loss Spectroscopy (REELS)
- Measurement of dopants in silicon
- Multitechnique Capability Including:
- X-ray photoelectron spectroscopy (XPS)
- Energy dispersive X-ray spectroscopy (EDX)
- Backscattered electron detection
- FIB
- Preparation Facilities Including:
- Fracture Stage
- Heating/Cooling Stage
- Evaporation Stage
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