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Austin AI, LLC - HRD 3000 high resolution X-ray diffraction system

Year of introduction
Status available
Company Austin AI, LLC
Categories X-ray spectrometer: XRD
Features
  • Ultra stable X-ray generator with an on board microprocessor controlled via a PC serial port
  • High brilliance glass and ceramic X-ray tubes, quickly rotatable between line and point focus positions
  • X-Y and rotatable stage for the tube shield
  • Parallel-beam optics using a Max-FluxTM Optical System
  • Big Eulerian cradle open chi-circle to align the sample in space
  • High, fast precision goniometer positioning by stepping motors with optical encoders
  • Seven degrees of freedom, all motorised.
  • Motorised sample holder of large dimensions with X-Y-Z translation, 150 mm in X and Y, 25 mm in Z to accommodate wafers of 200 mm or other types of sample
  • Secondary monochromator for Cr, Fe, Co, Cu and Mo radiations
  • High mechanical stability of the goniometer supported by a granite table
  • Xenon gas-filled proportional, scintillation counters, solid state, linear and curved position-sensitive detectors for either low background or high intensity
  • Microsoft’s Windows NT/2000/ME operating system in a 32-bit environment for instrument control, acquisition and reduction of data

The new dimension in X-ray diffraction
The HRD 3000 high resolution diffraction system incorporates the most advanced digital electronics, computers and Microsoft’s Windows 98/ME operating system. Exact angular positions of the goniometer circles are guaranteed by a well-devised combination of stepping motors and optical encoders. The goniometer circles are positioned at high speed.
The HRD 3000 diffractometer system can be used on a wide range of analytical problems, from texture to thin film analysis, strain measurements and reflectometry.
With this high performance, high resolution diffractometer, you can obtain outstanding results with amazing ease, when determining layer thickness and composition in semiconductors. The high resolution reflectometry studies can be performed with the HRD 3000 to characterise layer thickness, density, surface and interface roughness.
Seven independent degrees of movement freedom, allowing every possible sample position.
The high efficiency of the various components permits analytical results of high quality.
Different kind of source and optical components, several detectors and special attachments can be added to meet all your requirements. You have the choice of a large number easily mounted components. For more information on our system, attachments, and custom design accessories, contact us directly.
Powerful, user-friendly software makes measurement easier than ever and includes many sophisticated features to aid in the interpretation of the results.
Specifications
X-ray generator (PC controlled)
Maximum output power: 3 kW
Output stability: <0.01% (for 10% power supply fluctuation)
Max. output voltage: 60 kW
Max. output current: 60 mA
Voltage step width: 0.1 kV
Current step width: 0.1 mA
PC control serial mode: X-ray ON/OFF, settings of kV and mA, shutters
Safety devices: Door interlock mechaninsm, emergency push button X-ray ON lamp
Weight: 45 kg
Size: Width 48.3 cm, height 22 cm, depth 63 cm

X-ray tube
Type: Glass, Cu anode, fine focus
Focus: 0.4 x 8 mm
Max. output: 1.5 kW

Tube shield
Type: X-Y and rotatable stage

Goniometer
Type: GD 2000 Independent theta/2 theta horizontal
Variable scanning radius: 175 - 220 mm
Vertical scanning angular range: -110° < 2 theta < +165°
Smallest selectable stepsize: 0.0001° (2 theta)
Angular reproducibility: ±0.0001° (2 theta)
Scanning speed: 0.05° - 50°/min
Divergence slits: 4°; 2°; 1°; 1/2°; 1/4°
Anti-divergence slits: 4°; 2°; 1°; 1/2°; 1/4°
Receiving slits: 0.3; 0.2; 0.1 mm
Soller slits: 2°; 5°

Eulerian cradle
Type: big open Chi-circle - 3° £ Chi £ + 158°; -¥ < Phi < +¥ ;
- 75 mm £ X,Y £ + 75 mm; - 1 mm £ Z £ + 24 mm
Inner diameter: 400 mm

Detector
Type: Scintillation Counter NaI
Countrate: 500000 c/s
HV/PHA: High voltage supply 600 - 2000 V, gain, low, central and high level control

Case
Dimensions: Width 1190mm, height 1777mm, depth 800mm
Leakage X-rays: < 1 mSv/Year

Alignment kit
Type: Adjusted microscope and tools

Processing unit
Computer type: Personal computer, the latest version
Items controlled: X-ray generator, goniometer, detector, counting chain
Basic data processing: Qualitative and quantitative phase analysis. Rietveld analysis, crystalline structural analysis, crystallite size and lattice strain, crystallinity calculation, texture, strain, reflectometry. Pattern simulation, ODF calculated with different methods.





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