The sensitive high-resolution ion microprobe (also sensitive high mass-resolution ion microprobe or SHRIMP) is a large-diameter, double-focusing secondary ion mass spectrometer (SIMS) sector instrument produced by Australian Scientific Instruments in Canberra, Australia. Like other SIMS instruments, the SHRIMP microprobe bombards a sample under vacuum with a beam of primary ions that sputters secondary ions that are focused, filtered, and measured according to their energy and mass.
EVISA Instrument Database: SHRIMP 