EVISA Print | Glossary on | Contact EVISA | Sitemap | Home   
 Advanced search
The establishment of EVISA is funded by the EU through the Fifth Framework Programme (G7RT- CT- 2002- 05112).

Supporters of EVISA includes:

Thermo Fisher Launches New ICP-MS in Semiconductor Manufacturing


iCAP TQs ICP-MS for fast and reliable chemical monitoring

Photo showing the front of the iCAP TQs ICP-MS instrument from  ThermoThermo Fisher Scientific’s iCAP TQ (Triple Quadrupole) ICP-MS (inductively coupled plasma-mass spectrometer) is the recent version of TMO’s iCAP TQ ICP-MS that was launched in March 2017. It’s a dedicated semiconductor version that will provide “fast, reliable and reproducible measurement of low-level contaminants in ultra-high purity (UHP) chemicals required to support automated at-line monitoring and statistical process control for advanced semiconductor manufacturing processes.”

The iCAP TQs ICP-MS retains all the benefits of size and ease-of-use through streamlined workflows of the existing product line while also providing improved data quality and performance through a combination of cold plasma operation and powerful triple quadrupole interference removal. When combined with Thermo Scientific Qtegra Intelligent Scientific Data Software, an intuitive user interface and the Reaction Finder tool, fabrication facilities can reduce time-consuming method development and be more productive, faster.

The system requires minimal user maintenance and includes a fully inert sample introduction system, a dry pump for clean room environments and a dedicated gas distribution unit for lab safety and maximum flexibility. An ergonomic benchtop design with a compact footprint limits the use of valuable lab space and facilitates integration with specially designed peripherals for in-line monitoring of process chemicals or for vapor phase deposition (VPD) analysis.

Related EVISA information

Company database: Thermo Scientific
Instrument database: Thermo Scientific Products
Instrument database: iCAP-TQs ICP-MS
Instrument database: iCAP-RQ ICP-MS
Instrument database: Element-2 ICP-MS

Brief summary: ICP-MS - A versatile detection system for trace element and speciation analysis
Link page: Mass spectrometry resources

Related EVISA News

New Triple Quadrupole ICP-MS launched by Thermo Fisher (14.03.2017) 

Imprint     Disclaimer

© 2003 - 2024 by European Virtual Institute for Speciation Analysis ( EVISA )