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Thermo Fisher Launches New ICP-MS in Semiconductor Manufacturing
(16.03.2018)
On March 13, 2018, Thermo Fisher Scientific (TMO) announced the launch of the iCAP TQs ICP-MS for fast and reliable chemical monitoring aimed at advancing analytical capabilities for improving quality control and yield through process control and failure analysis in semiconductor manufacturing, mostly in Asia, particularly in the China market. This and other new products for this market are being presented during the SEMICON China event being held from March 14, 2018, to March 16, 2018.
iCAP TQs ICP-MS for fast and reliable chemical monitoring
 Thermo Fisher Scientific’s iCAP TQ (Triple Quadrupole) ICP-MS
(inductively coupled plasma-mass spectrometer) is the recent version of
TMO’s iCAP TQ ICP-MS that was launched in March 2017. It’s a dedicated
semiconductor version that will provide “fast, reliable and reproducible
measurement of low-level contaminants in ultra-high purity (UHP)
chemicals required to support automated at-line monitoring and
statistical process control for advanced semiconductor manufacturing
processes.”
The iCAP TQs ICP-MS retains all the benefits of size and ease-of-use through streamlined workflows of the existing product line, while also providing improved data quality and performance through a combination of cold plasma operation and powerful triple quadrupole interference removal. When combined with Thermo Scientific Qtegra Intelligent Scientific Data Software, an intuitive user interface and the Reaction Finder tool, fabrication facilities can reduce time-consuming method development and be more productive, faster.
The system requires minimal user maintenance and includes a fully inert sample introduction system, a dry pump for clean room environments and a dedicated gas distribution unit for lab safety and maximum flexibility. An ergonomic benchtop design with a compact footprint limits the use of valuable lab space and facilitates integration with specially designed peripherals for in-line monitoring of process chemicals or for vapour phase deposition (VPD) analysis.
 Related EVISA information
 Company database: Thermo Scientific
Instrument database: Thermo Scientific Products
Instrument database: iCAP-TQs ICP-MS
Instrument database: iCAP-RQ ICP-MS
Instrument database: Element-2 ICP-MS
Brief summary: ICP-MS - A versatile detection system for trace element and speciation analysis
Link page: Mass spectrometry resources
 Related EVISA News
New Triple Quadrupole ICP-MS launched by Thermo Fisher (14.03.2017)
last time modified: September 22, 2024
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