Secondary ion mass spectrometry (SIMS) is a mass-spectrometric technique that is used for microscopic
chemical analysis. A beam of primary ions with an energy of 5- 20
kiloelectronvolts (keV) bombards a small spot on the surface of the
sample under ultra- high vacuum conditions. Positive and negative
secondary ions sputtered from the surface are analyzed in a mass
spectrometer in regards to their mass-to-charge ratio.
EVISA Instrument Database: SIMS systems