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Instrument Database:
Agilent Technologies Inc. - 7500cs ICP-MS
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| Year of introduction |
2003 |
| Status |
historical ( out of sale ) |
| Company |
Agilent Technologies Inc.
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| Categories |
Mass spectrometer: ICP-MS
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The Ultimate Semiconductor Analyzer
The 7500cs is a high sensitivity reaction cell ICP-MS designed specifically to meet semiconductor industry demands for high performance, reliability and sensitivity in trace metal analysis. Agilent’s exclusive Octopole Reaction System (ORS) opens new analytical possibilities for ICP-MS in the semiconductor laboratory in interference removal. The ORS features an on-axis reaction cell, which is effective against challenging spectral interferences in a wide range of semiconductor matrices.
Features: - Ultra high sensitivity for the ultimate in detection power, featuring the ORS for removal of matrix interferences in the toughest semiconductor sample types
- The interference removal power of the ORS removes even S-based polyatomics in sulfuric acid, uniquely allowing the direct, on-mass measurement of Ti and Zn
- Removal of Ar-based interfering species such as Ar2 or ArO using H2 reaction mode
- Unmatched cool plasma performance with Agilent’s ShieldTorch interface gives ultimate BECs and complete flexibility for every application
- Optional 3rd cell gas line for NH3 reaction mode - for ultratrace vanadium measurement in high purity HCl
- New, Agilent-designed PFA inert sample introduction kit is included as standard
- Sample introduction system and interface designed for semiconductor use. Special shipping prep and full exhaust ducting for cleanroom use
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| Specifications |
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Dimensions and Weight
Mainframe: (W*D*H): 1100*600*640 mm
Weight: 175 kg
Hardware:
Nebulizer: Micro Flow Nebulizer
Spray Chamber: Quartz ( thermoelectrically controlled)
Torch: Quartz
Interface: Platinum cones
Six mass-flow Controllers: Plasma, Auxiliary, make-up and carrier gas lines, and two reaction gas lines
ShieldTorch System: Standard
ICP Source: 27.12 MHz solid state
Vaccum System: Three Stage
Ion Optics: Extraction/omega/Octopole Reaction Cell
Quadrupole: True hyperbolic cross-section rods
Quadrupole radio frequency: 3 MHz
Data aqusition: True simultaneous dual-mode electron multiplier with nine orders dynamic range
Minimum dwell time: 100 µs
Mass range: 2-260 amu
Rotary pump: one
PFA inert kit: Included in the accessory kit
Utility requirements
Electrical Power: single Phase 200-240 V, 30 A, 50/60Hz
Cooling Water:
Inlet temperature: 15-40°C
Minimum flow rate: 5L/min
Maximum inlet pressure: 230-350kPa
Arogn gas supply:
Minimum purity: 99,99%
Maximum flow rate: 20 L/min
Supply pressure: 700 kPa+/-3,5 %
Reaction gas supply:
Minimum purity: 99,999%
Maximum flow rate: H2: 7 L/min; He: 10 mL/min
Typical pressure: 40 kPa+/- 3,5%
Environmental Requirements:
Operating temeperature: 15-30°C, < 2°C/h (max. change: < 5°C/h)
Operating humidity: 20% - 80% ( non-condensing)
Regulatory Compliance:
Safety: CSA-C22.2 No. 1010
Eletromagnetic compatibility: EN55011: 1992 Group 1 Class A; EN 50082-1: 1997
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